Excimer laser gas

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Krypton Neon Mixtures


Krypton Neon Mixtures are used in 248nm lithography applications, usually in conjunction with a halogen gas mixture.



MAJOR COMPONENTS

COMPONENTS CONCENTRATION RANGE
Krypton 1.25% 1.2 - 1.3%
Neon Balance  



MAXIMUM IMPURITIES
COMPONENTS CONCENTRATION (ppmv)
Carbon Dioxide <5.0
Carbon Monoxide <1.0
Carbon Tetrafluoride <2.0
Helium <8.0
Hydrogen Fluoride/Moisture <25.0
Nitrogen <25.0
Oxygen <25.0
THC (as Methane) <1.0
Xenon <10.0
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