Excimer laser gas

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Argon Neon Mixtures (Ar&Ne)


 
Argon Neon Mixtures are used in 193nm lithography applications, usually in conjunction with a halogen gas mixture.



PHYSICAL CONSTANTS
COMPONENTS CONCENTRATION RANGE
Argon 3.5% 3.4 - 3.6%
Xenon 10 ppm 8 - 12 ppm
Neon Balance  



MAXIMUM IMPURITIES
COMPONENTS CONCENTRATION (ppmv)
Carbon Dioxide <0.5
Carbon Monoxide <0.5
Carbon Tetrafluoride <0.5
Helium <8.0
Moisture <0.5
Nitrogen <1.0
Oxygen <0.5
THC (as Methane) <0.5
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